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China Academy of Sciences: Shanghai Institute of Optics and Fine Mechanics has made progress in the research of computational lithography

According to a journal on the official website of the Chinese Academy of Sciences (CAS), the Laboratory of Information Optics and Optoelectronic Technology at the Shanghai Institute of Optics and Fine Mechanics (SIOM), CAS has recently made important progress in computational lithography. The laboratory proposed a fast optical proximity effect correction (OPC) technique based on virtual edges and pixelated mask patterns with double sampling rate, which can effectively improve the lithography resolution and increase the process window. Such technology is considered to be a new driving force for the continued development of IC chips in accordance with Moore’s Law

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Ella Shi

Ella Shi is a third-grade student of the Literature Department, a lover of literature and photography. She used to work for the college media community as an author of the school paper. Now she joins FirmKnow to practice and explore her business knowledge.
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